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SILICON WAFER PLATING TANK (A-52-ST-P01A)

Tank for 2 – 12 inch silicon wafer plating. Designed with overflow-mechanism. A gentle convection is generated from the base of the tank, while constant filtration is conducted.

This is for single-sided plating. Two types are available: acrylic and PP. For double-sided plating, see Double-sided Wafer Plating Equipment (A-52-STD).

Specification

Product No.Wafer SizeInternal DimensionsTank VolumesTank MaterialHeatproof Temp.
A-52-ST2-P01A2inchD100×W100×H100 mm1.5LAcryl65℃
A-52-ST4-P01A4inchD140×W140×H140 mm4.0LAcryl65℃
A-52-ST6-P01BW6inchD210×W210×H210 mm13LAcryl65℃
A-52-ST8-P01BW8inchD280×W280×H280 mm28LAcryl65℃
A-52-ST12-P01A12inchD230×W386×H420 mm47LAcryl65℃
A-52-ST2-P01A-12inchD100×W100×H100 mm1.5LPP80℃
A-52-ST4-P01A-14inchD140×W140×H140 mm4.0LPP80℃
A-52-ST6-P01BW16inchD210×W210×H210 mm13LPP80℃
A-52-ST8-P01BW18inchD280×W280×H280 mm28LPP80℃
A-52-ST12-P01A112inchD230×W386×H420 mm47LPP80℃

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PRODUCT CATEGORY


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  7. Heater/Thermostat
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