CATHODE ROCKER, WAFER PLATING
PADDLE AGITATOR (A-52-ST-P04D)
Device that agitates the vicinity of the sample, and can be used for single-sided plating of 2 to 8 inch sizes.
Two types are available: one for single-side plating and one for double-side plating.
- Paddle agitator for 12-inch size are build-to-order items.
- There is an optional PVC board to protect the enclosure
Features
- Improved plating uniformity
The paddles effectively agitate the sample surface. Stabilization of the agitator improves plating uniformity. - Metal Ion Supply to Hole Shaped Samples
For hole shaped samples such as vias, through holes and trenches, metal ion supply to the inside of the hole by agitation suppresses the increase in concentration overvoltage and is expected to result in good filling without voids or other defects. - Comply with international standards
Comply with IEC61010-1, and EU/DU and EW/DW types bears CE mark and also conform to EN61326-1.
Specifications
Standard-Type | 2 inch-type | 3,4 inch-type | 5,6 inch-type | 8 inch-type |
---|---|---|---|---|
Product No. | A-52-ST2-P04E | A-52-ST4-P04D | A-52-ST6-P04D | A-52-ST8-P04D |
Stroke | 30 - 50mm (*1) | 30 - 96mm | 30 - 150mm | 30 - 150mm |
Outer Dimention (mm) | 210(D)×180(W)×275(H) | 210(D)×180(W)×290(H) | 290(D)×270(W)×380(H) | 290(D)×270(W)×470(H) |
Main Unit Weight (*2) | E : 6.0kg EU, EW:6.5kg | D : 6.0kg DU, DW:6.5kg | D:12.9kg DU,DW:13.4kg | D:13.4kg DU,DW:13.9kg |
Speed | 0 - 130rpm | 0 - 130rpm | 0 - 130rpm | 0 - 130rpm |
Input Voltage(*2) | E: AC100-120V / EU: AC100-120V / EW: AC200-240V | D: AC100-120V / DU: AC100-120V / DW: AC200-240V | ||
Rated Output | 30W |
(*1) Up to 96mm with additional parts
(*2) There are three types, E/D type, EU/DU type, and EW/DW type, depending on the input voltage.
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