Silicon Wafer Cathode Cartridge(High current type)(A-52-STH*-P02A)

・Suitable for wafers of general thickness. (200μm or more)
・Possible to set higher current density than usual such as high speed plating.
・Suitable for plating all surfaces and increasing the total current.
・Plating is also deposited on the contacts (surface contacts) of the electrode ring
・Necessary to peel off the contact plating film on a regular basis
※ Wafer size is designed according to JEITA and SEMI standards. We also manufacture square type.

Specification

MaterialAcryl
Corresponding Inch number4-8inch
Heatproof Temp.0-65℃

Product List

Product No. Product Name
A-52-STH2-P02 2-inch Silicon Wafer Cathode Cartridge(Standard type/High current type)
A-52-STH3-P02 3-inch Silicon Wafer Cathode Cartridge(Standard type/High current type/for 4inch Tank)
A-52-STH4-P02 4-inch Silicon Wafer Cathode Cartridge(Standard type/High current type)
A-52-STH5-P02 5-inch Silicon Wafer Cathode Cartridge(Standard type/High current type/for 6inch Tank)
A-52-STH6-P02 6-inch Silicon Wafer Cathode Cartridge(Standard type/High current/Orientation Flat Spec. )
A-52-STH6-P02N 6-inch Silicon Wafer Cathode Cartridge(Standard type/High current/Notch Spec. )
A-52-STH8-P02 8-inch Silicon Wafer Cathode Cartridge(Standard type/High current type)

 

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