ANODE AND CATHODE, WAFER PLATING
Wafer Anode Plate
Anode plate for wafer plating tanks.
Size
Wafer Size | Anode Size(mm) | Product No. |
2inch | 60x170xt2 | A-52-ST2-P08 |
4inch | 106×200xt2 | A-52-ST4-P08 |
6inch | 160×275xt2 | A-52-ST6-P08 |
8inch | 200×350xt2 | A-52-ST8-P08 |
Micro CellⅠ | 59×95xt2 | A-53-M1-P08 |
Micro CellⅡ | 74×105xt2 | A-53-M2-P08 |
Micro CellⅢ | 94×140xt2 | A-53-M3-P08 |
10×15 | 28×120xt2 | A-53-M1-P81 |
30X30 | 44×145xt2 | A-53-M3-P81 |
Material
Product No.(*1) | Product Name |
A-52-ST□-P08-02 | Sumitomo Electrolytic Nickel, |
A-52-ST□-P08-07 | Sumitomo SK Nickel(Sulfur depolarized nickel) |
A-52-ST□-P08-08 | Phosphorous Copper |
A-52-ST□-P08-10 | Oxygen-free Copper |
A-52-ST□-P08-12 | High-Purity Tin |
A-52-ST□-P08-18 | Platinum coated Titanium |
A-52-ST□-P08-28 | Iridium Corted Titanium(for Copper Sulfate Bath) |
A-52-ST□P08-28-2 | Iridium Corted Titanium(for Gold, Trivalent Chromium Bath) |
(*1) □ indicates wafer size.
(*2) Anode plates of other materials can also be manufactured. Please contact us.
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