Features

• This jig is specially designed for plating laboratory equipment for silicon wafers, which is intended for wet plating.
• It can be used for precision plating of semiconductors, MEMS, LIGA, etc.
• Excellent uniformity of electrodeposition, with in-plane film thickness variation within ±3~5%.
• Jigs for double-sided wafer plating are also available by special order.

Types of Jigs

Three types of cathode cartridges are available: standard, sealed, and suction-sealed.
Please select the one best suited for your wafer size and plating thickness.

Type	Standard type	Sealed type	Suction and Sealed Type	High Current Type
Wafer Size	φ2-12inch 10-300mm□	φ2-4inch 10-100mm□	φ4-12inch 100-300mm□	φ4-8inch 100-200mm□
Overview	● Suitable for wafers of general thickness ● Plating is also deposited on the contacts (convex parts) of the electrode ring ● Necessary to peel off the contact plating film on a regular basis.	● Does not run around the contacts or the back side of the wafer. ● Can also be used as a jig for anodizing. ● Thick plating film is possible.	● Does not run around the contacts or the back side of the wafer. ● Can also be used as a jig for anodizing. ● Suitable for thin wafers that are easily damaged. Sealing can be improved by sucking with air in combination with a vacuum evacuator. ● Thick plating film is possible.	● Suitable for wafers of general thickness. ● Possible to set higher current density than usual such as high speed plating. ● Suitable for plating all surfaces and increasing the total current. ● Plating is also deposited on the contacts （surface contacts） of the electrode ring. ● Necessary to peel off the contact plating film on a regular basis.
Wafer Thickness	from 200μm	from 200μm	from 100μm	from 100μm
Plating Thickness	up to 20μm	from 20μm	from 20μm	from 20μm
Heatproof Temp.	0-65℃	0-65℃	0-80℃	0-65℃

Notices

• Wafer sizes are manufactured according to JEITA and SEMI standards.
• Orifler and notched cathode cartridges are available.
• Sealed and suction-sealed types are patented in Japan, USA, Europe, China, Korea, and Taiwan.

Custom-made

We custom manufacture jigs from one piece to fit your samples.
Please feel free to contact us for custom-made designs in the following cases.

• Special shapes such as round, square, round-cut fan, semi-circular, etc.
• When using samples with thicknesses other than JEITA and SEMI standards
• When you want to process multiple samples with a single jig
• When a jig for double-sided plating or a jig for flexible substrates is required